Fabrication of ultra-shallow junctions and advanced gate stacks for ULSI technologies using laser thermal processing

by CHONG YUNG FU
Published 2011

Method to form MOS transistors with shallow junctions using laser annealing

by CHONG, YUNG FU, PEY, KIN LEONG, SEE, ALEX, WEE, ANDREW THYE SHEN
Published 2012

Method for forming a shallow junction region using defect engineering and laser annealing

by ONG, KUANG KIAN, YEONG, SAI HOOI, PEY, KIN LEONG, CHAN, LAP, CHONG, YUNG FU
Published 2012

Incorporation of dielectric layer onto SThM tips for direct thermal analysis

by HU, CHANG CHAUN, PEY, KIN LEONG, CHONG, YUNG FU, KIN, CHIM WAI, NEUZIL, PAVEL, CHAN, LAP
Published 2012