Realization and simulation of high aspect ratio micro/nano structures by proton beam writing

by Chatzichristidi, M., Valamontes, E., Raptis, I., Van Kan, J.A., Watt, F.
Published 2014

High aspect ratio micro/nano machining with proton beam writing on aqueous developable - easily stripped negative chemically-amplified resists

by Chatzichristidi, M., Valamontes, E., Argitis, P., Raptis, I., van Kan, J.A., Zhang, F., Watt, F.
Published 2014

Realization and simulation of high-aspect-ratio micro/nanostructures by proton beam writing

by Valamontes, E., Chatzichristidi, M., Tsikrikas, N., Goustouridis, D., Raptis, I., Potiriadis, C., Van Kan, J.A., Watt, F.
Published 2014