Alternating phase shifted scattering bars for low k1 trench pattering

by Mehta, S.S., Kumar, R., Singh, N., Suda, H., Kubota, T., Kimura, Y., Kinoshita, H., Wong, T.K.S., Wei, J.
Published 2014

Swing effects in alternating phase shift mask lithography: Implications of low σ illumination

by Singh, N., Sun, H.Q., Foo, W.H., Mehta, S.S., Kumar, R., Adeyeye, A.O., Suda, H., Kubota, T., Kimura, Y., Kinoshita, H.
Published 2014