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Disilane chemisorption on Six Ge1-x (100) - (2×1): Molecular mechanisms and implications for film growth rates

Disilane chemisorption on Six Ge1-x (100) - (2×1): Molecular mechanisms and implications for film growth rates

by Ng, R.Q.-M., Tok, E.S., Kang, H.C.
Published 2014

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Article

2

Molecular mechanisms for disilane chemisorption on Si (100) - (2×1)

Molecular mechanisms for disilane chemisorption on Si (100) - (2×1)

by Ng, R.Q.-M., Tok, E.S., Kang, H.C.
Published 2014

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Article