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Ren, Zhong-Min
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Ren, Zhong-Min
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Ren, Zhong-Min
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Deposition of AlN thin films with cubic crystal structures on silicon substrates at room temperature
by
Ren
,
Zhong
-
Min
,
Lu, Yong-Feng
,
Goh, Yeow-Whatt
,
Chong, Tow-Chong
,
Ng, Mei-Ling
,
Wang, Jian-Ping
,
Cheong, Boon-Aik
,
Liew, Yun-Fook
Published 2014
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