Measurement bias detection, identification and elimination for multi-zone thermal processing in semiconductor manufacturing

by Ho, W.K., Yan, H., Romagnoli, J.A., Ling, K.V.
Published 2014

A Robust Strategy for Joint Data Reconciliation and Parameter Estimation

by Joe, Y.Y., Wang, D., Ching, C.B., Tay, A., Ho, W.K., Romagnoli, J.
Published 2014

Clustering intelligent sensor nodes for distributed fault detection & diagnosis

by Joe, Y.Y., Ho, W.K., Lim, K.W., Ding, Z.Q., Zhang, J.B., Ling, K.V., Romagnoli, J.A.
Published 2014

Clustering intelligent sensor nodes for distributed fault detection & diagnosis

by Joe, Y.Y., Ho, W.K., Lim, K.W., Ding, Z.Q., Zhang, J.B., Ling, K.V., Romagnoli, J.A.
Published 2014