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1

Defect engineering coupled with pulsed laser annealing for p+/n junction formation and pMOSFETs device enhancement

Defect engineering coupled with pulsed laser annealing for p+/n junction formation and pMOSFETs device enhancement

by Tan, Dexter Xueming.
Published 2012

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Theses and Dissertations

2

Method for fabricating semiconductor devices with shallow diffusion regions

Method for fabricating semiconductor devices with shallow diffusion regions

by TAN, DEXTER XUEMING, COLOMBEAU, BENJAMIN, ONG, CLARK KUANG KIAN, YEONG, SAI HOOI, NG, CHEE MANG, PEY, KIN LEONG
Published 2012

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Patent