Path to achieve sub-10-nm half-pitch using electron beam lithography

by Tavakkoli, A.K.G., Piramanayagam, S.N., Ranjbar, M., Sbiaa, R., Chong, T.C.
Published 2014

Generation of pronounced Fano Resonances and tuning of subwavelength spatial light distribution in plasmonic pentamers

by Rahmani, M., Lukiyanchuk, B., Ng, B., Tavakkoli, A.K.G., Liew, Y.F., Hong, M.H.
Published 2014

Reverse nanoimprint lithography for fabrication of nanostructures

by Tavakkoli, A.K.G., Ranjbar, M., Piramanayagam, S.N., Wong, S.K., Poh, W.C., Sbiaa, R., Chong, T.C.
Published 2014