Sidewall surface roughness of Sputtered Silicon 1: surface modelling

• المؤلفون الرئيسيون: Ali, Mohammad Yeakub, Hung, N. P., Ngoi, B. K. A., Yuan, S.
• التنسيق: مقال
• اللغة: English
• منشور في: Maney Publishing 2003
• الموضوعات: TS Manufactures
• الوصول للمادة أونلاين: http://irep.iium.edu.my/27107/1/019_SE1_9%282%29_097-103.pdf; http://irep.iium.edu.my/27107/
• المؤسسة: Universiti Islam Antarabangsa Malaysia

Mathematical models for the calculation of sidewall surface roughness have been developed for focused ion beam (FIB) sputtering. The surface roughness profile at the sidewall was different to the bottom surface profile for the same sputtering parameters and substrate material. The cumulative sp...