Fabrication of micro cavities by micro electrical discharged machining

• Main Authors: Ali, Mohammad Yeakub, Hung, Wayne N.P.
• Format: Conference or Workshop Item
• Language: English
• Published: 2000
• Subjects: TJ Mechanical engineering and machinery; TS Manufactures
• Online Access: http://irep.iium.edu.my/27305/1/070_ICM_2000_BUET_285-291.pdf; http://irep.iium.edu.my/27305/
• Institution: Universiti Islam Antarabangsa Malaysia

The LIGA (Lithography, Electroplating and Molding) technique can fabricate high aspect ratio micro components with sub-micrometer accuracy and few tens of nano meter surface finish. This technique uses deep x-ray lithography with synchrotron radiation and as a result, the process becomes very comple...