Surface roughness of FIB sputtered silicon

• Main Authors: Ali, Mohammad Yeakub, Hung, N. P., Yuan, S.
• Other Authors: Inasaki, Ichiro
• Format: Conference or Workshop Item
• Language: English
• Published: Kluwer Academic Publishers (Springer) 2001
• Subjects: TJ Mechanical engineering and machinery; TS Manufactures
• Online Access: http://irep.iium.edu.my/28903/1/surface_of_roughness.pdf; http://irep.iium.edu.my/28903/
• Institution: Universiti Islam Antarabangsa Malaysia

Mathematical models are developed to calculate the surface roughness of focused-ion-beam (FIB) sputtered surface. The surface roughness is the combination of the beam function and the material function. The beam function includes ion type, acceleration voltage, ion flux, intensity distribution,...