Fabrication of MSM UV photodetector based on ZnO films synthesized by RF magnetron sputtering / Halim Ahmad, Mat Johar Abdullah and Ajis Lepit

• Main Authors: Ahmad, Halim, Abdullah, Mat Johar, Lepit, Ajis
• Format: Article
• Language: English
• Published: Universiti Teknologi MARA, Sabah 2017
• Subjects: Metal oxide semiconductors; Detectors. Sensors. Sensor networks; Photoelectronic devices (General)
• Online Access: http://ir.uitm.edu.my/id/eprint/34421/1/34421.pdf; http://ir.uitm.edu.my/id/eprint/34421/; http://borneoakademika.sabah.uitm.edu.my/
• Institution: Universiti Teknologi Mara

C-axis oriented ZnO films were deposited on SiO2/Si substrates through RF magnetron sputtering, MSM UV photodetector using Ag/ZnO/Ag configuration were fabricated from the as prepared film while the heat treated film was used to fabricate MSM Schottky barrier UV photodetector using Al/ZnO/Ag configu...