Advanced analytical tools in KUKUM's microelectronics laboratory / R. Yusuf …[et al.]

• Main Authors: Yusuf, R., Taking, S., Halim, N.H.A., Aris, H., Hussein, I.
• Format: Conference or Workshop Item
• Language: English
• Published: 2006
• Subjects: Electronics
• Online Access: https://ir.uitm.edu.my/id/eprint/81936/1/81936.PDF; https://ir.uitm.edu.my/id/eprint/81936/
• Institution: Universiti Teknologi Mara

Advanced analytical tools that have been primarily used for research and development application in the past are now being used extensively to understand semiconductor failure analysis and reliability problems. In this paper, we will discuss an application and technique in the use of Atomic Force Mi...