Simulation study of convex corner undercutting in KOH and TMAH for a MEMS piezoresistive accelerometer

• Main Authors: Yusof, N., Soin, N., Noorakma, A.C.W.
• Format: Article
• Published: Penerbit UTM Press 2016
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.um.edu.my/18741/; http://dx.doi.org/10.11113/jt.v78.4914
• Institution: Universiti Malaya

Undercutting is a common problem in wet anisotropic etching. This problem in turn, influences the performance and sensitivity of MEMS devices. This paper investigates the use of corner compensation to prevent convex corner undercutting in a MEMS piezoresistive accelerometer. The Intellisuite CAD sim...