Effect of beams structures on dynamic behavior of piezoresistive accelerometer sensors
This paper presents the design and simulation analysis of MEMS piezoresistive accelerometer sensor which can be used as airbag sensors. In this study, five different shapes of accelerometer structures with identical proof mass volume are designed and simulated by using Comsol Multiphysics software....
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
Universiti Teknikal Malaysia Melaka
2017
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/18880/ http://journal.utem.edu.my/index.php/jtec/article/view/1784 |
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| Institution: | Universiti Malaya |