Fabrication Of 50 µm transistor and AlNiAu interconnection process

Generally process fabrication transistor will starts by cleaning the wafer, formation region drain, D and source, S, get oxide and deposited aluminum as contact with the source, drain and gate. Mask is very important thing to develop the pattern transfer in fabrication process Based on that, the pro...

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Bibliographic Details
Main Author: Shaffie Husin
Other Authors: Mohd Khairuddin Md Arshad (Advisor)
Format: Learning Object
Language:English
Published: Universiti Malaysia Perlis 2008
Subjects:
Online Access:http://dspace.unimap.edu.my/xmlui/handle/123456789/1938
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Institution: Universiti Malaysia Perlis
Language: English
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