Aluminium surface grain size analysis on RIE treatment

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Bibliographic Details
Main Authors:	Zaliman, Sauli, Dr., Retnasamy, Vithyacharan, Fairul Afzal, Ahmad Fuad, Ehkan, Phaklen, Dr., Palianysamy, Moganraj, Aaron, Koay Terr Yeow
Other Authors:	zaliman@unimap.edu.my
Format:	Article
Language:	English
Published:	Trans Tech Publications (TTP) 2014
Subjects:	Aluminium Grain size Reactive ion etching
Online Access:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/35370
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Institution:	Universiti Malaysia Perlis
Language:	English

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