Fabrication of a cost-effective MEMS-based piezoresistive cantilever sensor for gait movement analysis

Fabrication of a cost-effective MEMS-based piezoresistive cantilever sensor for gait movement analysis

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Bibliographic Details
Main Authors: Ahmad Fitri Anuar, Mahayudin, Salem, Saadon, Yufridin, Wahab, Fazmir, Hamzah, Muhammad Zulhilmi, Zainol, Shazlina, Johari, Mazlee, Mazalan
Other Authors: saadonsalem@yahoo.com
Format: Article
Language:English
Published: Kementerian Pendidikan Tinggi (KPT), Malaysia 2018
Subjects:
MEMS
Accelerometer
Micro cantilever
Piezoresistor
Polysilicon
Silicon
KrF laser
Micromachining
Gait analysis
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/52058
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Institution: Universiti Malaysia Perlis
Language: English

Internet

http://dspace.unimap.edu.my:80/xmlui/handle/123456789/52058

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