Investigation of plasma induced etch damage/changes in AlGaN/GaN HEMTs

Investigation of plasma induced etch damage/changes in AlGaN/GaN HEMTs

Link to publisher's homepage at http://ijneam.unimap.edu.my

Saved in:
Bibliographic Details
Main Authors: A., Ofiare, S., Taking, K., Karami, A., Dhongde, A., Al-Khalidi, E., Wasige
Format: Article
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2022
Subjects:
AlGaN/GaN
High electron mobility transistors (HEMTs)
Plasma induced damage
Post-gate annealing
Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/75096
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Universiti Malaysia Perlis
Language: English

Internet

http://dspace.unimap.edu.my:80/xmlui/handle/123456789/75096

Similar Items