Annealing effects on Polycrystalline Silicon Germanium (SiGe) thin films grown on nanostructured silicon substrates using thermal evaporation technique

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Bibliographic Details
Main Authors: Azhari, A. W., Eop, T. S., Che Halin, D. S., Sopian, K., Hashim, U., Zaidi, S. H.
Other Authors: ayuwazira@unimap.edu.my
Format: Article
Language:English
Published: Universiti Malaysia Perlis (UniMAP) 2022
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Online Access:http://dspace.unimap.edu.my:80/xmlui/handle/123456789/77147
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Institution: Universiti Malaysia Perlis
Language: English
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Summary:Link to publisher's homepage at http://ijneam.unimap.edu.my/