Optimization of line pattern transfer of integrated optical mach-zender interferometer for optical sensor

Master of Science in Microelectronic Engineering

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Bibliographic Details
Main Author:	Nurulbariah, Idris
Other Authors:	Mukhzeer, Mohammad Shahimin, Dr.
Format:	Thesis
Language:	English
Published:	Universiti Malaysia Perlis (UniMAP) 2016
Subjects:	Photolithography Photoresists Integrated Optical Mach-Zehnder Interferometer (IO-MZI)
Online Access:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/78345
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Institution:	Universiti Malaysia Perlis
Language:	English

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