Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography
International Conference on Advancement of Materials and Nanotechnology (ICAMN) 2007, 29th May - 1st June 2007 was held at Pulau Langkawi, Kedah, Malaysia. Link to publisher's homepage at http://proceedings.aip.org/
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American Institute of Physics
2010
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my.unimap-82052013-11-20T04:01:04Z Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography Uda, Hashim, Prof. Dr. Muhamad Emi Azri, Shohini DNA hybridization Lab-on-a-chip Nanogap Reverse spacer lithographic Spacer patterning technology International Conference on Advancement of Materials and Nanotechnology 2007 ICAMN 2007 International Conference on Advancement of Materials and Nanotechnology (ICAMN) 2007, 29th May - 1st June 2007 was held at Pulau Langkawi, Kedah, Malaysia. Link to publisher's homepage at http://proceedings.aip.org/ A reversed spacer patterning technology using a sacrificial layer and a chemical vapor deposition (CVD) spacer layer has been developed, and is demonstrated to achieve sub-50 nm structures with conventional dry etching. The minimum-sized features are defined not by the photolithography but by the CVD film thickness. Therefore, this technology yields critical dimension (CD) variations of minimum-sized features much smaller than that achieved by conventional optical or e-beam lithography and has a great potential to fabricate a nanosystems for the electrical detection of biomolecular interactions. 2010-07-06T02:15:53Z 2010-07-06T02:15:53Z 2010-03-11 Working Paper AIP Conference Proceedings, vol.1217 (1), 2010, pages 505-509 978-073540760-2 0094-243X http://link.aip.org/link/?APCPCS/1217/505/1 http://hdl.handle.net/123456789/8205 en Proceedings of International Conference on Advancement of Materials and Nanotechnology (ICAMN) 2007 American Institute of Physics |
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English |
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DNA hybridization Lab-on-a-chip Nanogap Reverse spacer lithographic Spacer patterning technology International Conference on Advancement of Materials and Nanotechnology 2007 ICAMN 2007 |
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DNA hybridization Lab-on-a-chip Nanogap Reverse spacer lithographic Spacer patterning technology International Conference on Advancement of Materials and Nanotechnology 2007 ICAMN 2007 Uda, Hashim, Prof. Dr. Muhamad Emi Azri, Shohini Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography |
| description |
International Conference on Advancement of Materials and Nanotechnology (ICAMN) 2007, 29th May - 1st June 2007 was held at Pulau Langkawi, Kedah, Malaysia.
Link to publisher's homepage at http://proceedings.aip.org/ |
| format |
Working Paper |
| author |
Uda, Hashim, Prof. Dr. Muhamad Emi Azri, Shohini |
| author_facet |
Uda, Hashim, Prof. Dr. Muhamad Emi Azri, Shohini |
| author_sort |
Uda, Hashim, Prof. Dr. |
| title |
Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography |
| title_short |
Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography |
| title_full |
Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography |
| title_fullStr |
Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography |
| title_full_unstemmed |
Theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography |
| title_sort |
theoretical and experimental study towards fabrication of nanogap dielectric biosensor by reversed spacer lithography |
| publisher |
American Institute of Physics |
| publishDate |
2010 |
| url |
http://dspace.unimap.edu.my/xmlui/handle/123456789/8205 |
| _version_ |
1643789093601017856 |