Incoming Work-In-Progress Prediction in Semiconductor Fabrication Foundry Using Long Short-Term Memory

• Main Authors: Tin, Tze Chiang, Chiew, Kang Leng, Phang, Siew Chee, Sze, San Nah, Tan, Pei San
• Format: Article
• Language: English
• Published: Hindawi Publishing 2019
• Subjects: QA75 Electronic computers. Computer science
• Online Access: http://ir.unimas.my/id/eprint/29616/1/Chiew.pdf; http://ir.unimas.my/id/eprint/29616/; http://downloads.hindawi.com/journals/cin/2019/8729367.pdf
• Institution: Universiti Malaysia Sarawak

Preventive maintenance activities require a tool to be offline for long hour in order to perform the prescribed maintenance activities. Although preventive maintenance is crucial to ensure operational reliability and efficiency of the tool, long hour of preventive maintenance activities increases th...