Application of Taguchi method in designing a 22nm high-k/metal gate NMOS transistor

This paper reports on the application of Taguchi method in modelling a 22nm gate length high-k/metal gate NMOS transistor. The Nominal-the-Best Signal-to-noise Ratio (SNR) using Taguchi's optimization technique was utilized to optimize the process parameters in determining the best threshold vo...

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Bibliographic Details
Main Authors: Afifah Maheran A.H., Menon P.S., Ahmad I., Shaari S.
Other Authors: 36570222300
Format: Conference Paper
Published: Trans Tech Publications 2023
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Institution: Universiti Tenaga Nasional
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