Investigation of Morphological, Optical, and Dielectric Properties of RF Sputtered WOx Thin Films for Optoelectronic Applications

• Main Authors: Mahjabin S., Haque M.M., Sobayel K., Selvanathan V., Jamal M.S., Bashar M.S., Sultana M., Hossain M.I., Shahiduzzaman M., Algethami M., Alharthi S.S., Amin N., Sopian K., Akhtaruzzaman M.
• Other Authors: 57217200870
• Format: Article
• Published: MDPI 2023
• Institution: Universiti Tenaga Nasional

Tungsten oxide (WOx) thin films were synthesized through the RF magnetron sputtering method by varying the sputtering power from 30 W to 80 W. Different investigations have been conducted to evaluate the variation in different morphological, optical, and dielectric properties with the sputtering pow...