Electrical testing for MEMS's piezoresistive pressure sensor

• Main Authors: Abd Wahab, M.Z.B., Sauli, Z.B., Ahmad, I., Suradi, W.B.
• Published: 2017
• Online Access: http://dspace.uniten.edu.my:8080/jspui/handle/123456789/5331
• Institution: Universiti Tenaga Nasional

Piezoresistive pressure sensors were fabricated and tested electrically at MIMOS' foundry. The CMOS integrated circuit processing facilities were used to form the piezoresistive sensor. The electrical testing was done using source measuring unit (SMU) of Agilent 4070 and digital multimeter (DMM...