Micromachined W-band integrated rectangular waveguide filter utilising SU-8

Micromachined W-band integrated rectangular waveguide filter utilising SU-8

This paper is a study on the design of microwave waveguide filter suitable for micromachining process. Novel structure and processes are introduced which allow accurate fabrication of low loss waveguide filter. This new technique applies micro-fabrication processes to improve fabrication accuracy. A...

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Bibliographic Details
Main Authors: Ismail, Alyani, Razalli, Mohammad Shahrazel, Mahdi, Mohd Adzir, Wan Darman, Wan Nurul Izza, Raja Abdullah, Raja Syamsul Azmir, Mohd Isa, Maryam
Format: Conference or Workshop Item
Language:English
Published: IEEE 2007
Online Access:http://psasir.upm.edu.my/id/eprint/47684/1/Micromachined%20W-band%20integrated%20rectangular%20waveguide%20filter%20utilising%20SU-8.pdf
http://psasir.upm.edu.my/id/eprint/47684/
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Institution: Universiti Putra Malaysia
Language: English

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http://psasir.upm.edu.my/id/eprint/47684/1/Micromachined%20W-band%20integrated%20rectangular%20waveguide%20filter%20utilising%20SU-8.pdf
http://psasir.upm.edu.my/id/eprint/47684/

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