Carrier Transport and I-V Characterization of Si, An/Si and Ag/Si Silicides Using Photoacoustic and Four Point Probe Techniques
The AdSi and Ag/Si systems have been studied extensively due to the importance of carrier transport and I-V characterization of metal silicide compounds in microelectronic applications. In this study, the metal thin film was deposited on the polished Si substrate and annealed in air environment....
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| Format: | Thesis |
| Language: | English English |
| Published: |
2005
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| Subjects: | |
| Online Access: | http://psasir.upm.edu.my/id/eprint/6271/1/FS_2005_43.pdf http://psasir.upm.edu.my/id/eprint/6271/ |
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| Institution: | Universiti Putra Malaysia |
| Language: | English English |