Low Voltage Rf Microelectro-Mechanical Switch Using 0.35 μm MIMOS CMOS Compatible Process

• Main Author: Jaafar, Haslina
• Format: Thesis
• Language: English
• Published: 2014
• Subjects: TK1-9971 Electrical engineering. Electronics. Nuclear engineering
• Online Access: http://eprints.usm.my/29034/1/LOW_VOLTAGE_RF_MICROELECTRO-MECHANICAL.pdf; http://eprints.usm.my/29034/
• Institution: Universiti Sains Malaysia

Low voltage RF MEMS switch that can be integrated with other circuits is required in the consumer product, industrial and telecommunication sector. Voltage actuation less than 10 V with simple fabrication process is desirable as most of applications need low power system with low fabrication cost....