SU-8 Piezoresistive Microcantilever For Chemical Sensing Application
In this research, the ultraviolet (UV) patternable polymer material, SU-8 with very low Young’s modulus compared to conventional silicon based material, is utilized as structural material for microcantilever to enhance the piezoresistive strain. In addition to that, a thorough Finite Element Analys...
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis |
| Language: | English |
| Published: |
2011
|
| Subjects: | |
| Online Access: | http://eprints.usm.my/41933/1/LEE_KOK_SIONG.pdf http://eprints.usm.my/41933/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Universiti Sains Malaysia |
| Language: | English |