Effect Of Annealing Temperature On Cerium Oxide Thin Films Grown By DC Sputtering Method

• المؤلفون الرئيسيون: Ainita Rozati Mohd, Zabidi, Hassan, Zainuriah, Lim, Way Foong
• التنسيق: Conference or Workshop Item
• اللغة: English
• منشور في: 2020
• الموضوعات: QC1-999 Physics
• الوصول للمادة أونلاين: http://eprints.usm.my/49082/1/ABSTRACT%20BOOK%20MNRG%202020.pdf%20cut%2069.pdf; http://eprints.usm.my/49082/

The cerium thin films were deposited on n-type Si (100) substrate by direct current (DC) sputtering followed by post-annealing at different temperature (400ᵒC and 600ᵒC, 800ᵒC, 1000ᵒC) in an oxygen ambient. In this study, the effect of annealing temperature on the crystallized CeO2 thin films was c...