Investigation Of Oxidation Process On SOI Wafer
Silicon-on-Insulator, SOI wafer technology is widely used in microelectronic devices due to its advantages that have been used to minimize or eliminate substrate leakage and improve design performance. They have fast speeds, error reduction, low power consumption, increased scaling, and latch-up i...
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| Format: | Monograph |
| Language: | English |
| Published: |
Universiti Sains Malaysia
2022
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| Online Access: | http://eprints.usm.my/56673/1/Investigation%20Of%20Oxidation%20Process%20On%20SOI%20Wafer_Shaharatul%20A%E2%80%99ini%20Salleh.pdf http://eprints.usm.my/56673/ |
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| Institution: | Universiti Sains Malaysia |
| Language: | English |