Modeling of TiN coating thickness using RSM approach

Modeling of TiN coating thickness using RSM approach

In this paper, modeling of Titanium Nitrite (TiN) coating thickness using Response Surface Method (RSM) is implemented. Insert cutting tools were coated with TiN using Physical Vapor Deposition (PVD) sputtering process. N2 pressure, Argon pressure and turntable speed were selected as process va...

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Bibliographic Details
Main Authors: Mohamad Jaya, Abdul Syukor, Mohd Hashim, Siti Zaiton, Haron, Habibollah, Muhamad, Mohd Razali, Hasan Basari, Abd Samad, Abd. Rahman, Md. Nizam
Format: Article
Language:English
Published: Trans tech Publication, Switzerland 2014
Online Access:http://eprints.utem.edu.my/id/eprint/14194/1/Modeling_of_TiN_Coating_Thickness_Using_RSM_Approach.pdf
http://eprints.utem.edu.my/id/eprint/14194/
https://www.scientific.net/KEM.594-595.556
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Institution: Universiti Teknikal Malaysia Melaka
Language: English

Internet

http://eprints.utem.edu.my/id/eprint/14194/1/Modeling_of_TiN_Coating_Thickness_Using_RSM_Approach.pdf
http://eprints.utem.edu.my/id/eprint/14194/
https://www.scientific.net/KEM.594-595.556

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