Screen-printed ceramic based MEMS piezoelectric cantilever for harvesting energy
Screen-printing technology provides a convenient method in fabricating thick-film conductive circuits and devices in the past few decades. Conventionally, piezoelectric thick-film is printed on alumina substrate with high mechanical Q-factor and resonates at higher frequency outside the range of am...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Trans Tech Publications
2014
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| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/14853/1/Advances%20in%20Science%20and%20Technology_Screen%20Printed%20Ceramic%20Based%20MEMS%20Piezoelectric%20Cantilever%20for%20Harvesting%20Enginer.pdf http://eprints.utem.edu.my/id/eprint/14853/ http://www.scientific.net/AST.90.84 |
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| Institution: | Universiti Teknikal Malaysia Melaka |
| Language: | English |