Smart control sampling system for metrology tool in semiconductor production line
This research is to implement a Smart Control Sampling (SCS) system for metrology tool in the Semiconductor industry factory for better traceability and dynamic control on quality sampling for wire bond proces. Wire Bond process is one of the most critical process in the overall assembly line whereb...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English English |
| Published: |
2021
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| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/26661/1/Smart%20control%20sampling%20system%20for%20metrology%20tool%20in%20semiconductor%20production%20line.pdf http://eprints.utem.edu.my/id/eprint/26661/2/Smart%20control%20sampling%20system%20for%20metrology%20tool%20in%20semiconductor%20production%20line.pdf http://eprints.utem.edu.my/id/eprint/26661/ https://plh.utem.edu.my/cgi-bin/koha/opac-detail.pl?biblionumber=121752 |
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| Institution: | Universiti Teknikal Malaysia Melaka |
| Language: | English English |
Internet
http://eprints.utem.edu.my/id/eprint/26661/1/Smart%20control%20sampling%20system%20for%20metrology%20tool%20in%20semiconductor%20production%20line.pdfhttp://eprints.utem.edu.my/id/eprint/26661/2/Smart%20control%20sampling%20system%20for%20metrology%20tool%20in%20semiconductor%20production%20line.pdf
http://eprints.utem.edu.my/id/eprint/26661/
https://plh.utem.edu.my/cgi-bin/koha/opac-detail.pl?biblionumber=121752