Micromachining Process for Fiber Optic Pressure Sensor's

Fiber optic interferometry pressure sensor is an excellent diaphragm-base measurement system.

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Bibliographic Details
Main Authors: Mohd Said, Muzalifah, Zainudin, Muhammad Noorazlan Shah, Mohammed Napiah, Zul Atfyi Fauzan, Mohd Noh, Zarina, Mohamad Yatim, Norhidayah
Format: Article
Language:English
Published: Trans Tech Publications 2011
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Online Access:http://eprints.utem.edu.my/id/eprint/8533/1/AMM.52-54.2060.pdf
http://eprints.utem.edu.my/id/eprint/8533/
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Institution: Universiti Teknikal Malaysia Melaka
Language: English
Description
Summary:Fiber optic interferometry pressure sensor is an excellent diaphragm-base measurement system.