Micromachining Process for Fiber Optic Pressure Sensor's

Fiber optic interferometry pressure sensor is an excellent diaphragm-base measurement system.

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Bibliographic Details
Main Authors:	Mohd Said, Muzalifah, Zainudin, Muhammad Noorazlan Shah, Mohammed Napiah, Zul Atfyi Fauzan, Mohd Noh, Zarina, Mohamad Yatim, Norhidayah
Format:	Article
Language:	English
Published:	Trans Tech Publications 2011
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://eprints.utem.edu.my/id/eprint/8533/1/AMM.52-54.2060.pdf http://eprints.utem.edu.my/id/eprint/8533/
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Institution:	Universiti Teknikal Malaysia Melaka
Language:	English

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