Effects of post-annealing on GaN thin films growth using RF magnetron sputtering
Radio-frequency (RF) magnetron sputtering is one of the methods to deposit thin films that have been widely used in the deposition of GaN thin films to fabricate optoelectronic devices. However, the crystallisation of the GaN films deposited using RF magnetron sputtering at room temperature shows Ga...
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Main Authors: | , , , , , , , , , , |
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Format: | Article |
Published: |
Inderscience Publishers
2022
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Subjects: | |
Online Access: | http://eprints.utm.my/id/eprint/101369/ http://dx.doi.org/10.1504/IJNT.2022.124511 |
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Institution: | Universiti Teknologi Malaysia |