Crystallization of polycrystalline silicon thin film by excimer laser annealing

• Main Author: Ab. Razak, Siti Noraiza
• Format: Thesis
• Language: English
• Published: 2011
• Subjects: Q Science (General)
• Online Access: http://eprints.utm.my/id/eprint/33707/1/SitiNoraizaBintiAbRazakMFS2011.pdf; http://eprints.utm.my/id/eprint/33707/; http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:72122?queryType=vitalDismax&query=Crystallization+of+polycrystalline+silicon+thin+film+by+excimer+laser+annealing&public=true
• Institution: Universiti Teknologi Malaysia

Enhancing the crystallization of silicon thin film is important for better performance of thin film transistor (TFT). In an attempt to achieve this goal,a fundamental study was carried out to enhance the crystallization of doped silicon thin film (STF) with various types of dopants. The dopants used...