Effect of multipulses exposure on excimer laser annealed polycrystalline silicon thin films

• Main Authors: Bidin, Noriah, Ab. Razak, Siti Noraiza
• Format: Article
• Published: Institute of Electrical and Electronics Engineers 2011
• Subjects: TA Engineering (General). Civil engineering (General)
• Online Access: http://eprints.utm.my/id/eprint/44878/
• Institution: Universiti Teknologi Malaysia

Silicon thin film (STF) is widely used as a transistor. It performance depends on its crystal structure. The larger the crystallization of STF the better the current flow. The goal of this work is to anneal the STF using laser ablation technique. In this attempt, an amorphous silicon thin film was p...