Ultra shallow junctions in CMOS devices

This congress will comprise 10 professional parallel forums including Advanced Nanomaterials, Nanomedicine and Nanobiotechnology, etc. The main objective of Nano S&T-2015 is to provide a comprehensive global platform for experts and participants from government, academia, enterprise, and other o...

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Main Authors:	Satoru, Matsumoto, Aid, Siti Rahmah
Format:	Conference or Workshop Item
Published:	2015
Subjects:	RC Internal medicine
Online Access:	http://eprints.utm.my/id/eprint/60623/ http://www.osa.org/en-us/meetings/global_calendar/events/2015/the_5th_annual_world_congress_of_nano_science_and/
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Institution:	Universiti Teknologi Malaysia

id	my.utm.60623
record_format	eprints
spelling	my.utm.606232017-02-21T08:25:26Z http://eprints.utm.my/id/eprint/60623/ Ultra shallow junctions in CMOS devices Satoru, Matsumoto Aid, Siti Rahmah RC Internal medicine This congress will comprise 10 professional parallel forums including Advanced Nanomaterials, Nanomedicine and Nanobiotechnology, etc. The main objective of Nano S&T-2015 is to provide a comprehensive global platform for experts and participants from government, academia, enterprise, and other organizations in the related field to exchange ideas and present results of ongoing research in the most state-of-the-art areas of nanoscience and nanotechnology. 2015 Conference or Workshop Item PeerReviewed Satoru, Matsumoto and Aid, Siti Rahmah (2015) Ultra shallow junctions in CMOS devices. In: The 5th Annual World Congress of Nano Science and Technology-2015 (NANO S&T-2015), 24-26 Sept, 2015, China. http://www.osa.org/en-us/meetings/global_calendar/events/2015/the_5th_annual_world_congress_of_nano_science_and/
institution	Universiti Teknologi Malaysia
building	UTM Library
collection	Institutional Repository
continent	Asia
country	Malaysia
content_provider	Universiti Teknologi Malaysia
content_source	UTM Institutional Repository
url_provider	http://eprints.utm.my/
topic	RC Internal medicine
spellingShingle	RC Internal medicine Satoru, Matsumoto Aid, Siti Rahmah Ultra shallow junctions in CMOS devices
description	This congress will comprise 10 professional parallel forums including Advanced Nanomaterials, Nanomedicine and Nanobiotechnology, etc. The main objective of Nano S&T-2015 is to provide a comprehensive global platform for experts and participants from government, academia, enterprise, and other organizations in the related field to exchange ideas and present results of ongoing research in the most state-of-the-art areas of nanoscience and nanotechnology.
format	Conference or Workshop Item
author	Satoru, Matsumoto Aid, Siti Rahmah
author_facet	Satoru, Matsumoto Aid, Siti Rahmah
author_sort	Satoru, Matsumoto
title	Ultra shallow junctions in CMOS devices
title_short	Ultra shallow junctions in CMOS devices
title_full	Ultra shallow junctions in CMOS devices
title_fullStr	Ultra shallow junctions in CMOS devices
title_full_unstemmed	Ultra shallow junctions in CMOS devices
title_sort	ultra shallow junctions in cmos devices
publishDate	2015
url	http://eprints.utm.my/id/eprint/60623/ http://www.osa.org/en-us/meetings/global_calendar/events/2015/the_5th_annual_world_congress_of_nano_science_and/
_version_	1643654927839395840

Ultra shallow junctions in CMOS devices

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