Undoped diamond-like carbon thin films grown by direct current-plasma enhanced chemical vapour deposition: structural and electrical properties

• Main Authors: Keng Yik, Jackie Chen, Deraman, Karim, Ong, Wai Kit, Wan Shamsuri, Wan Nurulhuda, Hussin, Rosli
• Format: Article
• Published: Trans Tech Publications 2014
• Subjects: Q Science
• Online Access: http://eprints.utm.my/id/eprint/63158/; http://dx.doi.org/10.4028/www.scientific.net/AMR.970.136
• Institution: Universiti Teknologi Malaysia

Undoped diamond - like carbon thin films have been grown by DC - PECVD system. The synthesis of the DLC films was carried out in the presence of gas of (CH4 + H2 + Ar) in a custom - made reactor. The substrate temperature was initiated from the range of 300 °C to 600 °C under an optimum pressurized...