Fabrication of si micropore and graphene nanohole structures by focused ion beam
A biosensor formed by a combination of silicon (Si) micropore and graphene nanohole technology is expected to act as a promising device structure to interrogate single molecule biopolymers, such as deoxyribonucleic acid (DNA). This paper reports a novel technique of using a focused ion beam (FIB) as...
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| Main Authors: | , |
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| Format: | Article |
| Published: |
MDPI AG
2020
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/86948/ http://dx.doi.org/10.3390/s20061572 |
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| Institution: | Universiti Teknologi Malaysia |