Heat-assisted μ-electrical discharge machining of silicon

Heat-assisted μ-electrical discharge machining of silicon

Micro-electrical discharge machining (µEDM) is an unconventional machining method that is suitable for machining of conductive materials including highly doped silicon (Si) wafers. This paper reports a novel method of heat-assisted µEDM machining of Si wafers by varying the temperature to increase t...

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Bibliographic Details
Main Authors: Daud, Noor Dzulaikha, Mohd. Ghazali, Farah Afiqa, Abd. Hamid, Fatimah Khairiah, Nafea, Marwan, Saleh, Tanveer
Format: Article
Published: Springer Science and Business Media Deutschland GmbH 2021
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://eprints.utm.my/id/eprint/95226/
http://dx.doi.org/10.1007/s00170-021-06734-y
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Institution: Universiti Teknologi Malaysia

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http://eprints.utm.my/id/eprint/95226/
http://dx.doi.org/10.1007/s00170-021-06734-y

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