Design and characterization of embedded microheater on CMOS-MEMS resonator for application in mass-sensitive gas sensors

• Main Authors: Ahmed, A.Y., Dennis, J.O., Md Khir, M.H., Mohamad Saad, M.N.
• Format: Conference or Workshop Item
• Published: IEEE Computer Society 2014
• Online Access: https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906335946&doi=10.1109%2fICIAS.2014.6869462&partnerID=40&md5=4a80f10089dee877ca72690bc6d5a433; http://eprints.utp.edu.my/32157/
• Institution: Universiti Teknologi Petronas

In utilizing CMOS-MEMS resonators as mass-sensitive platforms, a uniform temperature distribution on the membrane surface is critical. In this paper, a novel design of CMOS-MEMS resonator with embedded microheater to control the temperature over the sensing layer was successfully designed and charac...