Zhong, Z. W., Tian, Y. B., Ang, Y. J., Wu, H., & Engineering, S. o. M. a. A. (2013). Optimization of the chemical mechanical polishing process for optical silicon substrates.

Zhong, Z. W., Y. B. Tian, Y. J. Ang, H. Wu, و School of Mechanical and Aerospace Engineering. Optimization of the Chemical Mechanical Polishing Process for Optical Silicon Substrates. 2013.

Zhong, Z. W., et al. Optimization of the Chemical Mechanical Polishing Process for Optical Silicon Substrates. 2013.