Zhong, Z. W., Tian, Y. B., Ang, Y. J., Wu, H., & Engineering, S. o. M. a. A. (2013). Optimization of the chemical mechanical polishing process for optical silicon substrates.
Chicago Style CitationZhong, Z. W., Y. B. Tian, Y. J. Ang, H. Wu, and School of Mechanical and Aerospace Engineering. Optimization of the Chemical Mechanical Polishing Process for Optical Silicon Substrates. 2013.
MLA引文Zhong, Z. W., et al. Optimization of the Chemical Mechanical Polishing Process for Optical Silicon Substrates. 2013.
警告:這些引文格式不一定是100%准確.