APA引文

Liu, B., Dong, Z. L., Hua, Y., Fu, C., Li, X., Tan, P. K., . . . Engineering, S. o. M. S. &. (2019). Electron-beam radiation induced degradation of silicon nitride and its impact to semiconductor failure analysis by TEM.

Chicago Style Citation

Liu, Binghai, Zhi Li Dong, Younan Hua, Chao Fu, Xiaomin Li, Pik Kee Tan, Yuzhe Zhao, and School of Materials Science & Engineering. Electron-beam Radiation Induced Degradation of Silicon Nitride and Its Impact to Semiconductor Failure Analysis By TEM. 2019.

MLA引文

Liu, Binghai, et al. Electron-beam Radiation Induced Degradation of Silicon Nitride and Its Impact to Semiconductor Failure Analysis By TEM. 2019.