APA Citation

Tse, M. S., Tay, J. H., Wong, F. S., & Engineering, S. o. E. a. E. (2008). Application of supercritical CO2 for wafer processing steps.

Chicago Style Citation

Tse, Man Siu., Joo Hwa Tay, Fook Sin Wong, and School of Electrical and Electronic Engineering. Application of Supercritical CO2 for Wafer Processing Steps. 2008.

MLA Citation

Tse, Man Siu., Joo Hwa Tay, Fook Sin Wong, and School of Electrical and Electronic Engineering. Application of Supercritical CO2 for Wafer Processing Steps. 2008.

Warning: These citations may not always be 100% accurate.