Development of a CMOs-compatible carbon nanotube array transfer method

• Main Authors: Siah, Chun Fei, Lum, Lucas Yu Xiang, Wang, Jianxiong, Goh, Simon Chun Kiat, Tan, Chong Wei, Hu, Liangxing, Coquet, Philippe, Li, Hong, Tan, Chuan Seng, Tay, Beng Kang
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2021
• Subjects: Engineering; Carbon Nanotubes; Microelectronics Fabrication
• Online Access: https://hdl.handle.net/10356/146291
• Institution: Nanyang Technological University

Carbon nanotubes (CNTs) have, over the years, been used in research as a promising material in electronics as a thermal interface material and as interconnects amongst other applications. However, there exist several issues preventing the widespread integration of CNTs onto device applications, e.g....